Kawakami Masato - Program search result - SCEJ 53rd Autumn Meeting (Nagano, 2022)

`SCEJ 53rd Autumn Meeting (Nagano, 2022)`

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Program search result : Kawakami Masato : 1 program

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Authors field exact matches “Kawakami Masato”; 1 program is found.
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Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Day 1 13:00– 15:00	Chair: Kawakami Masato, Habuka Hitoshi
	DJ113	[Review lecture] Improvement of prediction accuracy of W-ALD deposition rate by machine learning (TTS) *Aita Michitaka, Yamasaki Hideaki, Hotta Takanobu, Kawaguchi Takuya, Narushima Kensaku, Kubo Atsushi, Mochizuki Seiichiro, Takagi Toshio	Machine Learning ALD Simulation	ST-24	221
	DJ115	Examination of Co-ALD process using CCTBA (U. Tokyo) *(Stu)Yamaguchi Jun, (Reg)Sato Noboru, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	ALD cobalt CCTBA	ST-24	617
	DJ116	[Featured presentation] Boron Doping Method using BCl3 gas for Silicon Minimal CVD (Yokohama Nat. U.) Kamochi Yuki, *(Reg)Habuka Hitoshi, (Minimal Fab./AIST) Ikeda Shin-ichi, Ishida Yuuki, Hara Shiro	Minimal Fab Silicon CVD Boron Doping	ST-24	9
	DJ117	Study of estimating vapor pressure of metal complex with COSMO-SAC method (U. Tokyo) *(Reg)Sato Noboru, (Stu)Yamaguchi Jun, (Stu)Wu Yuxuan, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	vapor pressure metal complex COSMO-SAC	ST-24	686
	DJ118	Functional protective film coating method by vacuum ultraviolet light irradiation (Gifu U.) *(Stu)Yokoi Akino, (Reg)Hayakawa Yukio, (Reg)Kambara Shinji	Vacuum ultraviolet light Polymer coating Surface modification	ST-24	237

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SCEJ 53rd Autumn Meeting (Nagano, 2022)

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