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SCEJ 53rd Autumn Meeting (Nagano, 2022)

Program search result : アスペクト : 2 programs

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Title (J) field includes “アスペクト”; 2 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 2
10:40– 11:00		CB206Investigation of solubility and diffusivity of Cu(tmhd)2 in scCO2 to design optimal Cu-SCFD process for high aspect ratio structure
(U. Tokyo) *(Stu)Moroi K., Huang Y. Y., Deura M., (Tokyo Tech) (Reg)Shimoyama Y., (U. Tokyo) (Reg)Shimogaki Yukihiro, (Reg)Momose T.
supercritical fluid deposition
solubility
diffusivity
SY-73399
Day 2
13:00– 13:40		AC213[Invited lecture] Plasma Process Technology for High Layering of 3D Flash Memory
(Kioxia) *Fukumizu Hiroyuki, Kurihara Kazuaki, Omura Mitsuhiro
Plasma Process
3D Flash Memory
Etching
ST-27850

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SCEJ 53rd Autumn Meeting (Nagano, 2022)

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