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SCEJ 53rd Autumn Meeting (Nagano, 2022)

Program search result : trimethylaluminium : 1 program

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Keywords field exact matches “trimethylaluminium”; 1 program is found.
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TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 1
11:00– 11:20		DJ107Investigation of AlN thin film synthesis method using alkylaluminum
(Kyoto U.) *(Stu)Murahashi Kousuke, Li Yafei, (Reg)Kageyama Miho, (Reg)Kawase Motoaki
chemical vapor deposition
AlN
trimethylaluminium
ST-24407

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SCEJ 53rd Autumn Meeting (Nagano, 2022)

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