Hall DJ, Day 1 - Hall and day program - SCEJ 53rd Autumn Meeting (Nagano, 2022)

`SCEJ 53rd Autumn Meeting (Nagano, 2022)`

Last modified: 2023-05-16 07:24:56

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Hall and day program : Hall DJ, Day 1

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Hall DJ(C3 3F 301), Day 1(Sep. 14)

ST-24

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
ST-24 [Trans-Division Symposium] CVD and Dry Processes
(10:00–11:40) (Chair: Noda Suguru)
10:00– 10:40	DJ104	[Review lecture] Crystalline materials frontier opened by flux-coating method (Shinshu U.) *Teshima Katsuya, Yamada Tetsuya, Hayashi Fumitaka, (Tokyo U. Sci/Shinshu U.) Terashima Chiaki	Flux method Crystalline layer Environmental and energy devices	ST-24	119
10:40– 11:00	DJ106	Investigation of fast filling conditions using high concentration hydrogen supply in SiC-CVI process (U. Tokyo) *(Stu)Kimura Shunsuke, (Stu)Otaka Yuhei, (Reg)Sato Noboru, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	SiC CVI CVD	ST-24	450
11:00– 11:20	DJ107	Investigation of AlN thin film synthesis method using alkylaluminum (Kyoto U.) *(Stu)Murahashi Kousuke, Li Yafei, (Reg)Kageyama Miho, (Reg)Kawase Motoaki	chemical vapor deposition AlN trimethylaluminium	ST-24	407
11:20– 11:40	DJ108	Density Function Theory Study of Cu Acetylacetonate Dissociative Adsorption on Cu (111) surface (U. Tokyo) *(Stu)Wu Yuxuan, (Reg)Sato Noboru, (Stu)Yamaguchi Jun, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	Atomic Layer Depositon Density Function Theory Surface Adsorption	ST-24	599
(13:00–15:00) (Chair: Kawakami Masato, Habuka Hitoshi)
13:00– 13:40	DJ113	[Review lecture] Improvement of prediction accuracy of W-ALD deposition rate by machine learning (TTS) *Aita Michitaka, Yamasaki Hideaki, Hotta Takanobu, Kawaguchi Takuya, Narushima Kensaku, Kubo Atsushi, Mochizuki Seiichiro, Takagi Toshio	Machine Learning ALD Simulation	ST-24	221
13:40– 14:00	DJ115	Examination of Co-ALD process using CCTBA (U. Tokyo) *(Stu)Yamaguchi Jun, (Reg)Sato Noboru, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	ALD cobalt CCTBA	ST-24	617
14:00– 14:20	DJ116	[Featured presentation] Boron Doping Method using BCl3 gas for Silicon Minimal CVD (Yokohama Nat. U.) Kamochi Yuki, *(Reg)Habuka Hitoshi, (Minimal Fab./AIST) Ikeda Shin-ichi, Ishida Yuuki, Hara Shiro	Minimal Fab Silicon CVD Boron Doping	ST-24	9
14:20– 14:40	DJ117	Study of estimating vapor pressure of metal complex with COSMO-SAC method (U. Tokyo) *(Reg)Sato Noboru, (Stu)Yamaguchi Jun, (Stu)Wu Yuxuan, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	vapor pressure metal complex COSMO-SAC	ST-24	686
14:40– 15:00	DJ118	Functional protective film coating method by vacuum ultraviolet light irradiation (Gifu U.) *(Stu)Yokoi Akino, (Reg)Hayakawa Yukio, (Reg)Kambara Shinji	Vacuum ultraviolet light Polymer coating Surface modification	ST-24	237
(15:10–17:00) (Chair: Shimoyama Yusuke, Tamaoki Naoki)
15:10– 15:40	DJ119	[Invited lecture] Microstructure and functionality of non-oxide ceramic layers by laser-assisted chemical vapor deposition (AIST) *Katsui Hirokazu, Hotta Mikinori, (Nagoya U.) Harada Katsuyoshi, (NIMS) Shimoda Kazuya	chemical vapor deposition laser microstructure	ST-24	198
15:40– 16:00	DJ121	Preparation of ZnO-TiO₂-CNT by in-flight PECVD coating process (Hiroshima U.) *(Stu)Kawahara Junto, (Reg)Kubo Masaru, (Reg)Shimada Manabu	photocatalytic activity composite material aerosol process	ST-24	437
16:00– 16:20	DJ122	Effect of temperature and pressure on synthesis of magnetic Iron oxide nanoparticles in super critical carbon dioxide (Tokyo Tech) *(Stu)Kariya Keito, (Reg)Orita Yasuhiko, (Reg)Shimoyama Yusuke	supercritical CO2 magnetic nanoparticle temperature and pressure	ST-24	528
16:20– 16:40	DJ123	Continuous gas-phase CVD synthesis of single-wall carbon nanotubes via rapid heating of catalyst source (Waseda U.) *(Stu)Chikaarashi Itsuki, (Reg)Ohsawa Toshio, (Reg)Noda Suguru	carbon nanotube chemical vapor deposition nanoparticle catalyst	ST-24	239
16:40– 17:00	DJ124	Washing of surface modified magnetite nanoparticles using supercritical CO₂ (Tokyo Tech) *(Reg)Orita Yasuhiko, Ikeda Kai, (Stu)Wijakmatee Thossaporn, (Reg)Shimoyama Yusuke	carbon dioxide magnetite nanoparticles supercritical washing	ST-24	497

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SCEJ 53rd Autumn Meeting (Nagano, 2022)

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