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SCEJ 53rd Autumn Meeting (Nagano, 2022)

Last modified: 2022-12-14 13:12:56

Hall and day program : Hall DJ, Day 1 : DJ113

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Hall DJ(C3 3F 301), Day 1(Sep. 14)

ST-24

TimePaper
ID
Title / AuthorsKeywordsTopic codeAck.
number
ST-24 [Trans-Division Symposium]
CVD and Dry Processes
(10:00–11:40) (Chair: Noda Suguru)
10:0010:40DJ104[Review lecture] Crystalline materials frontier opened by flux-coating method
(Shinshu U.) *Teshima Katsuya, Yamada Tetsuya, Hayashi Fumitaka, (Tokyo U. Sci/Shinshu U.) Terashima Chiaki
Flux method
Crystalline layer
Environmental and energy devices
ST-24119
10:4011:00DJ106Investigation of fast filling conditions using high concentration hydrogen supply in SiC-CVI process
(U. Tokyo) *(Stu)Kimura Shunsuke, (Stu)Otaka Yuhei, (Reg)Sato Noboru, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
SiC
CVI
CVD
ST-24450
11:0011:20DJ107Investigation of AlN thin film synthesis method using alkylaluminum
(Kyoto U.) *(Stu)Murahashi Kousuke, Li Yafei, (Reg)Kageyama Miho, (Reg)Kawase Motoaki
chemical vapor deposition
AlN
trimethylaluminium
ST-24407
11:2011:40DJ108Density Function Theory Study of Cu Acetylacetonate Dissociative Adsorption on Cu (111) surface
(U. Tokyo) *(Stu)Wu Yuxuan, (Reg)Sato Noboru, (Stu)Yamaguchi Jun, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
Atomic Layer Depositon
Density Function Theory
Surface Adsorption
ST-24599
(13:00–15:00) (Chair: Kawakami Masato, Habuka Hitoshi)
13:0013:40DJ113[Review lecture] Improvement of prediction accuracy of W-ALD deposition rate by machine learning
(TTS) *Aita Michitaka, Yamasaki Hideaki, Hotta Takanobu, Kawaguchi Takuya, Narushima Kensaku, Kubo Atsushi, Mochizuki Seiichiro, Takagi Toshio
Machine Learning
ALD
Simulation
ST-24221
13:4014:00DJ115Examination of Co-ALD process using CCTBA
(U. Tokyo) *(Stu)Yamaguchi Jun, (Reg)Sato Noboru, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
ALD
cobalt
CCTBA
ST-24617
14:0014:20DJ116[Featured presentation] Boron Doping Method using BCl3 gas for Silicon Minimal CVD
(Yokohama Nat. U.) Kamochi Yuki, *(Reg)Habuka Hitoshi, (Minimal Fab./AIST) Ikeda Shin-ichi, Ishida Yuuki, Hara Shiro
Minimal Fab
Silicon CVD
Boron Doping
ST-249
14:2014:40DJ117Study of estimating vapor pressure of metal complex with COSMO-SAC method
(U. Tokyo) *(Reg)Sato Noboru, (Stu)Yamaguchi Jun, (Stu)Wu Yuxuan, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
vapor pressure
metal complex
COSMO-SAC
ST-24686
14:4015:00DJ118Functional protective film coating method by vacuum ultraviolet light irradiation
(Gifu U.) *(Stu)Yokoi Akino, (Reg)Hayakawa Yukio, (Reg)Kambara Shinji
Vacuum ultraviolet light
Polymer coating
Surface modification
ST-24237
(15:10–17:00) (Chair: Shimoyama Yusuke, Tamaoki Naoki)
15:1015:40DJ119[Invited lecture] Microstructure and functionality of non-oxide ceramic layers by laser-assisted chemical vapor deposition
(AIST) *Katsui Hirokazu, Hotta Mikinori, (Nagoya U.) Harada Katsuyoshi, (NIMS) Shimoda Kazuya
chemical vapor deposition
laser
microstructure
ST-24198
15:4016:00DJ121Preparation of ZnO-TiO2-CNT by in-flight PECVD coating process
(Hiroshima U.) *(Stu)Kawahara Junto, (Reg)Kubo Masaru, (Reg)Shimada Manabu
photocatalytic activity
composite material
aerosol process
ST-24437
16:0016:20DJ122Effect of temperature and pressure on synthesis of magnetic Iron oxide nanoparticles in super critical carbon dioxide
(Tokyo Tech) *(Stu)Kariya Keito, (Reg)Orita Yasuhiko, (Reg)Shimoyama Yusuke
supercritical CO2
magnetic nanoparticle
temperature and pressure
ST-24528
16:2016:40DJ123Continuous gas-phase CVD synthesis of single-wall carbon nanotubes via rapid heating of catalyst source
(Waseda U.) *(Stu)Chikaarashi Itsuki, (Reg)Ohsawa Toshio, (Reg)Noda Suguru
carbon nanotube
chemical vapor deposition
nanoparticle catalyst
ST-24239
16:4017:00DJ124Washing of surface modified magnetite nanoparticles using supercritical CO2
(Tokyo Tech) *(Reg)Orita Yasuhiko, Ikeda Kai, (Stu)Wijakmatee Thossaporn, (Reg)Shimoyama Yusuke
carbon dioxide
magnetite nanoparticles
supercritical washing
ST-24497

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SCEJ 53rd Autumn Meeting (Nagano, 2022)


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