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SCEJ 53rd Autumn Meeting (Nagano, 2022)

Program search result : Habuka Hitoshi : 6 programs

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Authors field exact matches “Habuka Hitoshi”; 6 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 1
13:00– 15:00		   Chair: Kawakami Masato, Habuka Hitoshi
DJ113[Review lecture] Improvement of prediction accuracy of W-ALD deposition rate by machine learning
(TTS) *Aita Michitaka, Yamasaki Hideaki, Hotta Takanobu, Kawaguchi Takuya, Narushima Kensaku, Kubo Atsushi, Mochizuki Seiichiro, Takagi Toshio
Machine Learning
ALD
Simulation
ST-24221
DJ115Examination of Co-ALD process using CCTBA
(U. Tokyo) *(Stu)Yamaguchi Jun, (Reg)Sato Noboru, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
ALD
cobalt
CCTBA
ST-24617
DJ116[Featured presentation] Boron Doping Method using BCl3 gas for Silicon Minimal CVD
(Yokohama Nat. U.) Kamochi Yuki, *(Reg)Habuka Hitoshi, (Minimal Fab./AIST) Ikeda Shin-ichi, Ishida Yuuki, Hara Shiro
Minimal Fab
Silicon CVD
Boron Doping
ST-249
DJ117Study of estimating vapor pressure of metal complex with COSMO-SAC method
(U. Tokyo) *(Reg)Sato Noboru, (Stu)Yamaguchi Jun, (Stu)Wu Yuxuan, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
vapor pressure
metal complex
COSMO-SAC
ST-24686
DJ118Functional protective film coating method by vacuum ultraviolet light irradiation
(Gifu U.) *(Stu)Yokoi Akino, (Reg)Hayakawa Yukio, (Reg)Kambara Shinji
Vacuum ultraviolet light
Polymer coating
Surface modification
ST-24237
Day 1
14:00– 14:20		DJ116[Featured presentation] Boron Doping Method using BCl3 gas for Silicon Minimal CVD
(Yokohama Nat. U.) Kamochi Yuki, *(Reg)Habuka Hitoshi, (Minimal Fab./AIST) Ikeda Shin-ichi, Ishida Yuuki, Hara Shiro
Minimal Fab
Silicon CVD
Boron Doping
ST-249
Day 3
13:00– 13:40		   Chair: Habuka Hitoshi, Iwamoto Takeshi
BB313[Review lecture] Equipment and technology of CMP for semiconductor device wafers
(EBARA) (Cor)Hiyama Hirokuni
CMP
Semiconductor device
Equipment
SY-7665
Day 3
14:20– 14:40		   Chair: Habuka Hitoshi, Iwamoto Takeshi
BB317Morphology control of Bi anode for rechargeable magnesium battery and its charge/discharge characteristics
(Osaka Metro. U.) *(Stu)Matsumoto Amane, Narumoto Natsuki, (Reg)Okamoto Naoki, (Reg)Saito Takeyasu
electrodeposition
rechargeable magnesium battery
SY-76763
Day 3
15:00– 15:20		BB319Water Flow Improved by Side Wall Pinhole Outlets of Silicon Wafer Wet Cleaning Bath
(Yokohama Nat. U.) Tsuchida Toko, Takahashi Toshinori, *(Reg)Habuka Hitoshi, (Pre-Tech) Goto Akihiro
Silicon wafer
Wet cleaning bath
Water flow
SY-767
Day 3
15:20– 16:00		   Chair: Habuka Hitoshi, Saito Takeyasu
BB320[Invited lecture] Liquid crystal-polymer hybrid devices and their applications
(Akita U.) Yamaguchi Rumiko
Liquid crystal
Polymer
Hybrid device
SY-7662
BB321[Invited lecture] Heat and resource recirculation by thermoelectric power generation
(AIST) *Funahashi Ryoji, Mikami Masashi
Resource recirculation
Thermoelectric power generation
Heat recirculation
SY-7663

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SCEJ 53rd Autumn Meeting (Nagano, 2022)

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