SCEJ 88th Annual Meeting (Tokyo, 2023)
Program search result : 化学気相堆積過程 : 1 program
The preprints(abstracts) are now open (Mar. 1st). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants in Period I/II and invited persons are required.
Title (J) field includes “化学気相堆積過程”; 1 program is found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | F118 | CVD process from dichlorosilane, boron trichloride and monomethylsilane gases | dihlorosilane boron trichloride monomethylsilane | 5-h | 7 |
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SCEJ 88th Annual Meeting (Tokyo, 2023)
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