SCEJ 88th Annual Meeting (Tokyo, 2023)
Program search result : AlN : 1 program
The preprints(abstracts) are now open (Mar. 1st). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants in Period I/II and invited persons are required.
Keywords field exact matches “AlN”; 1 program is found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | F115 | Aluminum nitride film production by chemical vapor deposition from triethylaluminum | CVD triethylaluminum AlN | 5-h | 540 |
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SCEJ 88th Annual Meeting (Tokyo, 2023)
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