Keywords field exact matches “Mist CVD”; 2 programs are found.
The search results are sorted by the start time.
Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
Day 1 | C122 | [Invited lecture] Reaction mechanism of mist CVD | mist CVD functional thin film fabrication technology growth mechanism | K-1 | 703 |
Day 2 | C206 | [Invited lecture] Development of 3rd generation mist CVD system | Mist CVD oxide thin film fabrication thin film devices | K-3 | 730 |
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SCEJ 88th Annual Meeting (Tokyo, 2023)