Authors and Chairs (J) field exact matches “霜垣 幸浩”; 4 programs are found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
Day 1 | F119 | Refinement of surface reaction mechanism of SiC-CVI based on theoretical study | SiC CVI surface reaction model | 5-h | 245 |
Day 1 | F120 | In-situ visible light reflectance observation method for designing Co-ALD process with high substrate selectivity. | ALD in-situ observation reflectance | 5-h | 597 |
Day 1 | F122 | Density Function Theory Study of Copper bis(2,2,6,6-tetramethyl-3,5-heptanedionate) Adsorption on Cu (111) surface | Atomic Layer Depositon Density Function Theory Surface Adsorption | 5-h | 217 |
Day 1 | F123 | Investigation on pretreatment conditions for low-resistivity copper film formation on dielectrics using supercritical fluid deposition | SCFD Polymer resistivity | 5-h | 705 |
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SCEJ 88th Annual Meeting (Tokyo, 2023)