Topics Code field begins with “5-h”; 14 programs are found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
Day 1 | F113 | Chemical Vapor Deposition Rate Control of Bismuth-based Perovskite Thin Film for Photovoltaic Performances Improvement | Chemical vapor deposition Methylammonium bismuth iodide Molten bismuth | 5-h | 554 |
Day 1 | F114 | The coke deposition rate from paraffins and olefins | fouling coking CVD | 5-h | 528 |
Day 1 | F115 | Aluminum nitride film production by chemical vapor deposition from triethylaluminum | CVD triethylaluminum AlN | 5-h | 540 |
Day 1 | F116 | Molecular Simulation Study on Effect of Group-III Precursors on III-V Compound Crystal Growth | MOCVD molecular simulations III-V compound | 5-h | 547 |
Day 1 | F118 | CVD process from dichlorosilane, boron trichloride and monomethylsilane gases | dihlorosilane boron trichloride monomethylsilane | 5-h | 7 |
Day 1 | F119 | Refinement of surface reaction mechanism of SiC-CVI based on theoretical study | SiC CVI surface reaction model | 5-h | 245 |
Day 1 | F120 | In-situ visible light reflectance observation method for designing Co-ALD process with high substrate selectivity. | ALD in-situ observation reflectance | 5-h | 597 |
Day 1 | F122 | Density Function Theory Study of Copper bis(2,2,6,6-tetramethyl-3,5-heptanedionate) Adsorption on Cu (111) surface | Atomic Layer Depositon Density Function Theory Surface Adsorption | 5-h | 217 |
Day 1 | F123 | Investigation on pretreatment conditions for low-resistivity copper film formation on dielectrics using supercritical fluid deposition | SCFD Polymer resistivity | 5-h | 705 |
Day 3 | PD357 | Synthesis of boron nitride nanotubes using boric acid as a boron source | Boron nitride nanotube Chemical vapor deposition Template coating | 5-h | 79 |
Day 3 | PD363 | Formation of texture on silicon substrates by alkaline etching, and evaluation of the texture | alkaline etching silicon substrates texture | 5-h | 312 |
Day 3 | PD373 | Study of Co deposition with Atomic Layer Deposition on an ultra light-weight X-ray telescope | Atomic Layer Deposition micropore optics x-ray | 5-h | 516 |
Day 3 | PD372 | Fabrication of mono-crystalline Si film on porous Si by rapid vapor deposition method | Mono-crystalline Si film Rapid vapor deposition Porous Si | 5-h | 157 |
Day 3 | PD376 | CFD simulation of CVD reactors in the CH3SiCl3(MTS)/H2 system using a simple SiC growth model | CVD MTS CFD | 5-h | 676 |
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SCEJ 88th Annual Meeting (Tokyo, 2023)