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SCEJ 88th Annual Meeting (Tokyo, 2023)

Program search result : 5-h : 14 programs

The preprints(abstracts) are now open (Mar. 1st). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants in Period I/II and invited persons are required.

Topics Code field begins with “5-h”; 14 programs are found.
The search results are sorted by the start time.

TimePaper
ID
Title / AuthorsKeywordsTopic codeAck.
number
Day 1
13:0013:20
F113Chemical Vapor Deposition Rate Control of Bismuth-based Perovskite Thin Film for Photovoltaic Performances Improvement
(Kyoto U.) *(Int)Yang Ziguang, (Stu)Togami Keito, (Stu)Tanabe Maika, (Reg)Kawase Motoaki
Chemical vapor deposition
Methylammonium bismuth iodide
Molten bismuth
5-h554
Day 1
13:2013:40
F114The coke deposition rate from paraffins and olefins
(Kyoto U.) *(Stu)Nakano Shinji, (Reg)Fujitsuka Hiroyasu, (Reg)Kawase Motoaki
fouling
coking
CVD
5-h528
Day 1
13:4014:00
F115Aluminum nitride film production by chemical vapor deposition from triethylaluminum
(Kyoto U.) *(Stu)Murahashi Kousuke, (Stu)Li Yafei, (Reg)Kawase Motoaki
CVD
triethylaluminum
AlN
5-h540
Day 1
14:0014:20
F116Molecular Simulation Study on Effect of Group-III Precursors on III-V Compound Crystal Growth
(Kyoto U.) *(Stu)Li Yafei, (Stu)Murahashi Kousuke, (Reg)Kawase Motoaki
MOCVD
molecular simulations
III-V compound
5-h547
Day 1
14:4015:00
F118CVD process from dichlorosilane, boron trichloride and monomethylsilane gases
(Yokohama Nat. U.) Otani Mana, Muroi Mitsuko, *(Reg)Habuka Hitoshi
dihlorosilane
boron trichloride
monomethylsilane
5-h7
Day 1
15:0015:20
F119Refinement of surface reaction mechanism of SiC-CVI based on theoretical study
(U. Tokyo) *(Reg)Sato Noboru, (Stu)Kimura Shunsuke, (Stu)Otaka Yuhei, Wakiyama Tomoya, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
SiC
CVI
surface reaction model
5-h245
Day 1
15:2015:40
F120In-situ visible light reflectance observation method for designing Co-ALD process with high substrate selectivity.
(U. Tokyo) *(Stu)Kimura Shunsuke, (Stu)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
ALD
in-situ observation
reflectance
5-h597
Day 1
16:0016:20
F122Density Function Theory Study of Copper bis(2,2,6,6-tetramethyl-3,5-heptanedionate) Adsorption on Cu (111) surface
(U. Tokyo) *(Stu)Wu Yuxuan, (Reg)Sato Noboru, (Stu)Yamaguchi Jun, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
Atomic Layer Depositon
Density Function Theory
Surface Adsorption
5-h217
Day 1
16:2016:40
F123Investigation on pretreatment conditions for low-resistivity copper film formation on dielectrics using supercritical fluid deposition
(U. Tokyo) *(Stu)Nakajima Yusuke, Huang Yuyuan, (Reg)Shimogaki Yukihiro, (Reg)Momose Takeshi
SCFD
Polymer
resistivity
5-h705
Day 3
9:2010:20
PD357Synthesis of boron nitride nanotubes using boric acid as a boron source
(Waseda U.) *(Stu·PCEF)Ebisu Sota, Sawada Tetsuro, (Reg)Sugime Hisashi, (Reg)Osawa Toshio, (Reg)Noda Suguru
Boron nitride nanotube
Chemical vapor deposition
Template coating
5-h79
Day 3
9:2010:20
PD363Formation of texture on silicon substrates by alkaline etching, and evaluation of the texture
(Gifu U.) *(Stu)Nakagawa Masato, Komiyama Masaharu, (Reg)Nishida Satoshi
alkaline etching
silicon substrates
texture
5-h312
Day 3
9:2010:20
PD373Study of Co deposition with Atomic Layer Deposition on an ultra light-weight X-ray telescope
(Tokyo Metro. U.) *(Stu)Tsuji Y., Ishi D., Fukushima A., Ezoe Y., Ishikawa K., Numazawa M., Inagaki A., Ueda Y., Morishita H., Sekiguchi L., Murakawa T., Yamaguchi K., Ishikawa R., Morimoto D., Yamada Y., (NAOJ) Mitsuda K.
Atomic Layer Deposition
micropore optics
x-ray
5-h516
Day 3
10:2011:20
PD372Fabrication of mono-crystalline Si film on porous Si by rapid vapor deposition method
(Waseda U.) *(Stu·PCEF)Ohashi Misako, (Reg)Osawa Toshio, (Reg)Noda Suguru
Mono-crystalline Si film
Rapid vapor deposition
Porous Si
5-h157
Day 3
10:2011:20
PD376CFD simulation of CVD reactors in the CH3SiCl3(MTS)/H2 system using a simple SiC growth model
(Nagoya U.) *(Stu)Ogawa Tatsuya, Fukumoto Kazui, (Reg)Machida Hiroshi, (Reg)Norinaga Koyo
CVD
MTS
CFD
5-h676

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SCEJ 88th Annual Meeting (Tokyo, 2023)


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