Authors field exact matches “Kimura Shunsuke”; 2 programs are found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
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Day 1 | F119 | Refinement of surface reaction mechanism of SiC-CVI based on theoretical study | SiC CVI surface reaction model | 5-h | 245 |
Day 1 | F120 | In-situ visible light reflectance observation method for designing Co-ALD process with high substrate selectivity. | ALD in-situ observation reflectance | 5-h | 597 |
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SCEJ 88th Annual Meeting (Tokyo, 2023)