Title (J) field includes “蒸着法”; 2 programs are found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
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Day 2 | G223 | Improvement of permselectivity through silica membranes deposited by the 2 step method | silice membrane Hydrogen 2 step deposition | 4-a | 279 |
Day 3 | PD372 | Fabrication of mono-crystalline Si film on porous Si by rapid vapor deposition method | Mono-crystalline Si film Rapid vapor deposition Porous Si | 5-h | 157 |
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SCEJ 88th Annual Meeting (Tokyo, 2023)