SCEJ 88th Annual Meeting (Tokyo, 2023)
Program search result : CVD : 4 programs
The preprints(abstracts) are now open (Mar. 1st). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants in Period I/II and invited persons are required.
Keywords field exact matches “CVD”; 4 programs are found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | F114 | The coke deposition rate from paraffins and olefins | fouling coking CVD | 5-h | 528 |
| Day 1 | F115 | Aluminum nitride film production by chemical vapor deposition from triethylaluminum | CVD triethylaluminum AlN | 5-h | 540 |
| Day 3 | PD376 | CFD simulation of CVD reactors in the CH3SiCl3(MTS)/H2 system using a simple SiC growth model | CVD MTS CFD | 5-h | 676 |
| Day 3 | F315 | Formation of graphite by CCVD method from C2H2 using Fe catalyst | CVD carbon reaction mechanism | 5-a | 187 |
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SCEJ 88th Annual Meeting (Tokyo, 2023)
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