Last modified: 2018-09-04 10:00:00
Authors field exact matches “Nagahata Kazunori”; 1 program is found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
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Day 3 | CD316 | [Invited lecture] Interface level formation at SiO2/Si by plasma etching | Plasma Etching Damage | ST-25 | 330 |
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SCEJ 50th Autumn Meeting (Kagoshima, 2018)