Last modified: 2018-09-04 10:00:00
Authors field exact matches “Yonezawa Yoshiyuki”; 1 program is found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
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Day 2 | CD217 | Investigation of trench-filling mechanism and the effect of adding HCl during 4H-SiC CVD | 4H-SiC trench filling HCl | ST-25 | 142 |
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SCEJ 50th Autumn Meeting (Kagoshima, 2018)