Last modified: 2018-09-04 10:00:00
Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
ST-25 [Trans-Division Symposium] CVD and Dry Process | |||||
(13:00–14:00) (Chair: | |||||
CD213 | [Review lecture] Development and prospects of hard coating for cutting tool using thermal CVD method | CVD Cutting tool Hard coating | ST-25 | 468 | |
CD215 | New alumina CVD process from alkyl aluminum | CVD alkyl aluminum alumina | ST-25 | 882 | |
(14:00–15:00) (Chair: | |||||
CD216 | Synthesis of Al-rich fcc-TiAlN by thermal CVD (2) | CVD TiAlN cutting tool | ST-25 | 561 | |
CD217 | Investigation of trench-filling mechanism and the effect of adding HCl during 4H-SiC CVD | 4H-SiC trench filling HCl | ST-25 | 142 | |
CD218 | Theoretical study of surface reaction process on SiC-CVI process | SiC CVI Surface Reaction | ST-25 | 919 |
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SCEJ 50th Autumn Meeting (Kagoshima, 2018)