ST-17 - Session programs - SCEJ 48th Autumn Meeting (Tokushima, 2016)

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`SCEJ 48th Autumn Meeting (Tokushima, 2016)`

Last modified: 2016-09-07 09:49:00

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Session programs : ST-17

The third-day program of ST-12 (Hall D) was partly changed. ST-12 Program (The yellow-backed area is affected.)

ST-17 CVD & Dry Processes - Reaction Engineering for Controlling Microstructure and Functions

Organizer:

Sugiyama Masakazu (U. Tokyo), Shimada Manabu (Hiroshima U.), Kawakami Masato (Tokyo Electron)

CVD and other dry processes are core technology in the industry producing electronics devices, solar cells, MEMS, and functional coatings. The motivation of this symposium is to discuss the logical optimization and design for controlling the microstructure and functions of thin films and fine particles produced by CVD or other dry processes based on the theoretical understanding of reaction mechanisms. Young Researcher Award will be given to distinguished young speakers chosen at the session.

Hall M, Day 1 | Hall M, Day 2

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Hall M(Bldg.4/5 2F 4-201), Day 1(Sep. 6)
(10:40–12:00) (Chair: Momose Takeshi)
10:40– 11:00	M106	[Invited lecture] Development of the uniform and high-quality thin film fabrication technique on large-area substrate under atmospheric-pressure with using mist (Kochi U. Tech.) *Kawaharamura Toshiyuki, Giang T. Dang, Suwa Yuta, Sato Shota, Matsuzaki Shunsuke	mist CVD Leidenfrost effect metal oxide functional thin film	ST-17	601
11:00– 11:20	M107	Preparation of perovskite solar cell by spray-deposition process (U. Tokyo) *(Stu)Kominami Yuuki, (Ful)Tsuji Yoshiko	perovskite solar cell TiO2 spray-deposition	ST-17	641
11:20– 11:40	M108	High speed deposition of aggregated film of silicon nano-particle using plasma jet CVD (Gifu U.) Nagai Yusuke, Hosokawa Hirohito, *(Ful)Nishida Satoshi, Komiyama Masaharu	CVD plasma nanoparticle	ST-17	533
11:40– 12:00	M109	[The JCEJ Outstanding Paper Award] Effects of annealing on the morphology and porosity of porous TiO₂ films fabricated by deposition of aerosol nanoparticles (Hiroshima U.) *(Ful)Kubo Masaru, Mantani Yuki, (Ful)Shimada Manabu	Phase transformation Plasma-enhanced CVD Sintering	ST-17	263
(13:00–14:00) (Chair: Kawakami Masato)
13:00– 13:20	M113	[Invited lecture] Development of ALD-Based Gas Barrier Films with Ultralow Moisture Permeation for Complicated Structures (ISM, ULVAC,Inc.) *Zama Hideaki, Honda Kazuhiro	atomic layer despoition gas barrier film water vapor transmission rate	ST-17	412
13:20– 13:40	M114	Effect of underlayer materials on initial film growth of SiC-CVI (U. Tokyo) *(Stu)Shima K., (Stu)Sato N., (Stu)Funato Y., (IHI) (Ful)Fukushima Y., (U. Tokyo) (Ful)Momose T., (Ful)Shimogaki Y.	CVD SiC methyltrichlorosilane	ST-17	718
13:40– 14:00	M115	Effect of HCl gas addition to SiC-CVI process aiming for uniform infiltration (U. Tokyo) *(Stu)Naka Tomoaki, (Stu)Sato Noboru, (Stu)Shima Kohei, (Stu)Funato Yuichi, (IHI) (Ful)Fukushima Yasuyuki, (U. Tokyo) (Ful)Momose Takeshi, (Ful)Shimogaki Yukihiro	SiC CVI	ST-17	972
(14:00–15:00) (Chair: Noda Suguru)
14:00– 14:20	M116	Synthesis of thin films incorporating high aspect ratio particles by a PECVD method using gas and solid raw materials (Hiroshima U.) *(Stu·PCEF)Shigematsu Yuki, (Ful)Kubo Masaru, (Ful)Shimada Manabu	Nanocomposite film Carbon nanotube Abnormal growth	ST-17	264
14:20– 14:40	M117	Reaction mechanism of supercritical fluid deposition for Bi₄Ti₃O₁₂ (U. Tokyo) *(Stu)Zhao Yu, (Ful)Shimoyama Yusuke, (Ful)Momose Takeshi, (Ful)Shimogaki Yukihiro	supercritical fluid deposition reaction mechanism Bi4Ti3O12	ST-17	924
14:40– 15:00	M118	Ultra-porous carbon electrode fabricated from supercritical drying and application for lithium-air battery (Tokyo Tech) *(Stu)Kunanusont N., (Ful)Shimoyama Y.	porous carbon electrode supercritical drying lithium-air battery	ST-17	678
Hall M(Bldg.4/5 2F 4-201), Day 2(Sep. 7)
(9:00–10:00) (Chair: Kawase Motoaki)
9:00– 9:20	M201	Study of preparing cubic boron nitride films by thermal CVD (U. Tokyo) *(Stu)Sato Hiroki, (Ful)Momose Takeshi, (Kyocera) Tanibuchi Takahito, (U. Tokyo) (Ful)Shimogaki Yukihiro	CVD boron nitride coating	ST-17	626
9:20– 9:40	M202	Deposition and evaluation of TiC hard coating on chemically treated WC-Co substrate (Osaka Pref. U.) *(Stu)Tanaka Chihiro, (Stu)Suzuki Soichiro, (Ful)Okamoto Naoki, (Ful)Saito Takeyasu, (Osaka U.) Higuchi Koji, Kitajima Akira	adhesion strength TiC hard coating Cemented carbide	ST-17	634
9:40– 10:00	M203	Control of underlayer selectivity during supercritical fluid deposition of Cu by exploiting fluid-phase reactions (U. Tokyo) *(Ful)Momose Takeshi, Kawamura Yousuke, (Ful)Shimoyama Yusuke, (Ful)Shimogaki Yukihiro	Supercritical fluid deposition Cu underlayer selectivity	ST-17	769
(10:00–11:00) (Chair: Miura Yutaka)
10:00– 10:20	M204	Evaluation of ferroelectric capacitor with Al-doped ZnO electrode by sputtering (Osaka Pref. U.) *(Stu·PCEF)Takada Y., (Stu)Tamano R., (Ful)Okamoto N., (Ful)Saito T., Yoshimura T., Fujimura N., (Osaka U.) Higuchi K., Kitajima A.	ferroelectric capacitor Al-doped ZnO sputtering	ST-17	903
10:20– 10:40	M205	Rapid deposition of epitaxial Cu film on repeatedly used sapphire for precisely controlled CVD synthesis of graphene (Waseda U.) *(Stu)Nagai Y., (Ful)Hasegawa K., (Ful)Noda S.	graphene chemical vapor deposition epitaxial growth	ST-17	429
10:40– 11:00	M206	Optimization of hot-wire-assisted ALD process aiming for highly-pure and -oriented Co film fabrication (U. Tokyo) *(Stu)Naka Tomoaki, (Stu)Shima Kohei, (Ful)Momose Takeshi, (Ful)Shimogaki Yukihiro	Hot-wire-assisted ALD Cobalt	ST-17	1002
(11:00–12:00) (Chair: Shimada Manabu)
11:00– 11:20	M207	Synthesis of carbon nanotube through a diesel engine using normal dodecane/ethanol mixing fuel (Tokyo Tech) *(Stu)Suzuki Shunsuke, (Ful)Mori Shinsuke	carbon nanotube diesel engine flame synthesis	ST-17	20
11:20– 11:40	M208	Diffusion of carbon into metal substrates in carbon CVD from C5--C7 hydrocarbons (Kyoto U.) *(Ful)Kawase M., (Stu)Baba S.	CVD Carbon Solid-phase diffusion	ST-17	303
11:40– 12:00	M209	[Invited lecture] In silico synthesis of molecular sieve carbons for controlling gas separation characteristics (Kyoto U.) *(Ful)Tanaka H., Adachi T., Yamane Y., (Ful)Miyahara M.	CVD Molecular simulation Air separation	ST-17	395
(13:00–14:00) (Chair: Saito Takeyasu)
13:00– 13:40	M213	[Review lecture] Current Status and Issues of Li-ion Batteries, Characteristics Required for Positive Electrode Materials (NICHIA) Sumitomo Takefumi	Li-ion Large format battery Positive Electrode Materials	ST-17	176
13:40– 14:00	M215	Rapid vapor deposition of Si-Cu/carbon nanotube/Cu hybrid films for lithium secondary battery anodes (Waseda U.) *(Stu·APCE)Aoi Shigeki, (Ful)Hasegawa Kei, (Ful)Noda Suguru	lithium secondary battery physical vapor deposition carbon nanotube	ST-17	912
(14:00–15:20) (Chair: Sugiyama Masakazu)
14:00– 14:20	M216	Effect of heat treatments on the photocatalytic activity of Ag-TiO₂ nanocomposite films prepared by a one-step gas-phase deposition process (Hiroshima U.) *(Ful)Kusdianto K., Jiang Dianping, (Ful)Kubo Masaru, (Ful)Shimada Manabu	PECVD Annealing Crystal-phase	ST-17	267
14:20– 14:40	M217	Construction of the overall reaction model for optimizing SiC-CVD using Methyltrichlorosilane (3) (U. Tokyo) *(Stu)Funato Yuichi, (Stu)Sato Noboru, (Stu)Shima Kohei, (Stu)Naka Tomoaki, (IHI) (Ful)Fukushima Yasuyuki, (U. Tokyo) (Ful)Momose Takeshi, (Ful)Shimogaki Yukihiro	SiC Methyltrichlorosilane Modelization	ST-17	868
14:40– 15:20	M218	[Review lecture] in-situ observations on III-V semiconductor quantum dots and its growth mechanism (NIT Anan) Tsukamoto Shiro	MBE STM in-situ	ST-17	35

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SCEJ 48th Autumn Meeting (Tokushima, 2016)

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