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SCEJ 51st Autumn Meeting (2020)

Program search result : CH3SiCl3 : 2 programs

All sessions can be attended from the On-line (Virtual) Meeting Site.
Preprints(Abstracts) are now open. Click the Paper IDs. (Registered participants and invited persons only)
The ID/PW was sent on Sept. 10 (for earlybird registered participants) or on Sept. 23 (for on-site registered participants).
(Aug. 8) Flash session of SY-69 has been cancelled.
(Aug. 24,27) Schedule of SY-74 (X306, X307) and HQ-11 (D301) has been changed.

Keywords field exact matches “CH3SiCl3”; 2 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 3
13:40– 14:00		K315Theoretical study for modeling surface reactions on SiC-CVI process
CH3SiCl3
SiC CVI
surface reaction
ST-22665
Day 3
14:00– 14:20		K316Construction of surface reaction mechanism of SiC-CVI based on theoretical study
SiC-CVI
Surface reaction mechanism
CH3SiCl3
ST-22682
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SCEJ 51st Autumn Meeting (2020)

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