Authors field exact matches “Okamoto Naoki”; 2 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.
Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
Day 1 | VC108 | Deposition and evaluation of Max Compounds as wiring materials for next-generation semiconductors | Max Phase semiconductor | ST-22 | 864 |
Day 2 | VC204 | Preparation of TiCN thin film with Ti[N(CH3)2]4 by PACVD | plasma CVD TDMAT TiCN | ST-22 | 863 |
DispCtl: |
---|
Technical program
Technical sessions (Wide)
(For narrow screen)
Session programs
Search in technical program
SCEJ 52nd Autumn Meeting (Okayama, 2021)