ST-22 - Session programs - SCEJ 52nd Autumn Meeting (Okayama, 2021)

`SCEJ 52nd Autumn Meeting (Okayama, 2021)`

Last modified: 2023-05-16 07:28:20

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Session programs : ST-22

ST-25,SY-56,SY-64,SY-65,SY-70 are changed from live streaming sessions to online sessions.
The preprints are now open (Sep. 8). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.

ST-22 [Trans-Division Symposium]
CVD and Dry Processes

Organizers:

Kawase Motoaki (Kyoto Univ.), Tamaoki Naoki (Kioxia), Saito Takeyasu (Osaka Pref. Univ.), Miyake Masato (NAIST)

CVD and other dry processes are core technology in the industry applications for solar cell, electronics devices, MEMS, and functional coatings. This symposium motivates to discuss the logical optimization and design for controlling the microstructure and functions of thin films and fine particles produced by CVD, ALD or other dry processes based on the theoretical understanding of reaction mechanisms. Young Researcher Award will be given to distinguished young speakers chosen at the session.

Hall VC, Day 1 | Hall VC, Day 2

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Hall VC(Online), Day 1(Sep. 22)
(10:40–12:00) (Chair: Tamaki Naoki, Kawase Motoaki)
10:40– 11:20	VC106	[Review lecture] Semiconductor Memories: Technology, Economy, Industry and Future Growth (Micron Memory Japan) Aoto Nahomi	CVD semiconductor memory industry	ST-22	517
11:20– 11:40	VC108	Deposition and evaluation of Max Compounds as wiring materials for next-generation semiconductors (Osaka Pref. U.) *(Stu)Wakamatsu Kazunobu, Ueda Kazuki, (Reg)Okamoto Naoki, (Reg)Saito Takeyasu	Max Phase semiconductor	ST-22	864
11:40– 12:00	VC109	Process development of bismuth-based perovskite CVD for solar cells (Kyoto U.) *(Stu)Togami Keito, (Stu)Matsuda Megumi, Yang Ziguang, (Reg)Kawase Motoaki	CVD perovskite methylammonium bismuth iodide	ST-22	375
(13:20–14:40) (Chair: Kawase Motoaki, Funato Yuuichi)
13:20– 13:40	VC114	Direct synthesis of organic modified iron oxide nanocrystals using supercritical CO₂ as a reaction field (Tokyo Tech) *(Reg)Orita Yasuhiko, Kariya Keito, (Stu)Wijakmatee Thossaporn, (Reg)Shimoyama Yusuke	Supercritical carbon dioxide iron oxide nanocrystals organic modification	ST-22	629
13:40– 14:00	VC115	Effect of additives on photocatalysis and crystallinity of TiO₂ made by supercritical fluid deposition (U. Tokyo) *(Stu)Aji Ryosuke, (Reg)Deura Momoko, (Tokyo Tech) (Reg)Shimoyama Yusuke, (U. Tokyo) (Reg)Shimogaki Yukihiro, (Reg)Momose Takeshi	supercritical fluid deposition photocatalyst crystallinity	ST-22	142
14:00– 14:20	VC116	Examination of precursor vaporization characteristics in pulse-supply ALD (U. Tokyo) *(Stu)Yamaguchi Jun, (Reg)Deura Momoko, (Reg)Momose Takeshi, (Daikin Industries) (Cor)Matsunaga Takayuki, (Cor)Yamauchi Akiyoshi, (Cor)Kishikawa Yousuke, (U. Tokyo) (Reg)Shimogaki Yukihiro	ALD precursor vaporization	ST-22	594
14:20– 14:40	VC117	Si-B film deposition from boron trichloride and monomethylsilane gases (Yokohama Nat. U.) Muroi Mitsuko, *(Reg)Habuka Hitoshi	Chemical vapor deposition Silicon-Boron film Mechanism	ST-22	40
14:40– 15:10		Break
(15:10–17:00) (Chair: Miyake Masato, Kawakami Masato)
15:10– 15:40	VC119	[Invited lecture] Control of physical properties of CNT yarns spun directly from tall and dense CNT arrays and their application to energy and mechanical devices (Okayama U.) Hayashi Yasuhiko	Carbon nanotube (CNT) arrays Dry Spinning CNT yarns Energy and mechanical devices	ST-22	516
15:40– 16:00	VC121	[Featured presentation] Enhanced CO₂-assisted growth of single-wall carbon nanotube arrays with Fe/AlO_x catalyst annealed without CO₂ (Waseda U.) *(Reg)Li Mochen, (Stu)Yasui Kotaro, (Kindai U.) (Reg)Sugime Hisashi, (Waseda U.) (Reg)Noda Suguru	chemical vaper deposition thermal annealing single-wall carbon nanotubes	ST-22	672
16:00– 16:20	VC122	SiC Infiltration Process Including Exhaust Gas Recycling for SiC_f/SiC CMC (U. Tokyo) *(Stu)Otaka Yuhei, (Reg)Sato Noboru, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) (Reg)Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	SiC reuse CVI	ST-22	689
16:20– 16:40	VC123	Development and validation of overall reaction model for polycrystalline SiC-CVD process design (U. Tokyo) *(Stu)Moroi K., (Stu)Oku T., (Reg)Deura M., (Reg)Momose T., (Reg)Shimogaki Y.	Chemical Vapor Deposition silicon carbide macrocavity method	ST-22	792
16:40– 17:00	VC124	Numerical simulation of the CVI process in a ceramic matrix composites manufacturing reactor (Nagoya U.) *(Stu)Ogawa Tatsuya, (Reg)Fukumoto Kazui, (Reg)Machida Hiroshi, (Reg)Norinaga Koyo	CVI Numerical simulation MTS	ST-22	562
Hall VC(Online), Day 2(Sep. 23)
(9:00–11:40) (Chair: Saito Takeyasu, Tamaki Naoki)
9:00– 9:40	VC201	[Review lecture] Growth control of nano-particles in reactive plasmas and its applications (Kyushu U.) Koga Kazunori	CVD nano-particles growth control	ST-22	514
9:40– 10:00	VC203	One-step fabrication of CuO-loaded TiO₂ nanoparticulate thin film for photocatalytic application under visible light irradiation (Hiroshima U.) *(Stu)Hudandini Meditha, Jiang Dianping, (ITS, Indonesia) Kusdianto K., (Hiroshima U.) (Reg)Kubo Masaru, (Reg)Shimada Manabu	PECVD-PVD nanocomposite heterojunction	ST-22	154
10:00– 10:20	VC204	Preparation of TiCN thin film with Ti[N(CH₃)₂]₄ by PACVD (Osaka Pref. U.) *(Stu)Takeuchi Riku, (Reg)Okamoto Naoki, (Reg)Saito Takeyasu	plasma CVD TDMAT TiCN	ST-22	863
10:20– 10:50		Break
10:50– 11:20	VC206	[Invited lecture] Challenge to simulation of microspace and macrotime structural changes under plasma irradiation (Nat. I. Fusion Sci.) Ito Atsushi	CVD plasma numerical simulation	ST-22	519
11:20– 11:40	VC208	Construction of gas-phase elementary reaction mechanism of TiAlN-CVD based on theoretical study (U. Tokyo) *(Reg)Sato Noboru, (Stu)Yamaguchi Jun, (Kyocera) (Cor)Kubo Hayato, (Cor)Sugiyama Takanori, (U. Tokyo) (Reg)Deura Momoko, (Reg)Momose Takeshi, (Kyocera) (Cor)Tanibuchi Takahito, (U. Tokyo) (Reg)Shimogaki Yukihiro	TiAlN CVD Elementary reaction model	ST-22	785

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SCEJ 52nd Autumn Meeting (Okayama, 2021)

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SCEJ 52nd Autumn Meeting (Okayama, 2021)

Session programs : ST-22

ST-22 [Trans-Division Symposium] CVD and Dry Processes

`SCEJ 52nd Autumn Meeting (Okayama, 2021)`

ST-22 [Trans-Division Symposium]
CVD and Dry Processes