Keywords field exact matches “macrocavity method”; 1 program is found.
The search results are sorted by the start time.
Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
Day 1 | VC123 | Development and validation of overall reaction model for polycrystalline SiC-CVD process design | Chemical Vapor Deposition silicon carbide macrocavity method | ST-22 | 792 |
Technical program
Technical sessions (Wide)
(For narrow screen)
Session programs
Search in technical program
SCEJ 52nd Autumn Meeting (Okayama, 2021)