Authors field exact matches “Shimogaki Yukihiro”; 6 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.
Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
Day 1 | VC115 | Effect of additives on photocatalysis and crystallinity of TiO2 made by supercritical fluid deposition | supercritical fluid deposition photocatalyst crystallinity | ST-22 | 142 |
Day 1 | VC116 | Examination of precursor vaporization characteristics in pulse-supply ALD | ALD precursor vaporization | ST-22 | 594 |
Day 1 | VC122 | SiC Infiltration Process Including Exhaust Gas Recycling for SiCf/SiC CMC | SiC reuse CVI | ST-22 | 689 |
Day 1 | VC123 | Development and validation of overall reaction model for polycrystalline SiC-CVD process design | Chemical Vapor Deposition silicon carbide macrocavity method | ST-22 | 792 |
Day 2 | VN206 | Supercritical fluid deposition of Cu for sub-millimeter-scale features | supercritical fluid deposition sub-millimeter-scale features | SY-73 | 685 |
Day 2 | VC208 | Construction of gas-phase elementary reaction mechanism of TiAlN-CVD based on theoretical study | TiAlN CVD Elementary reaction model | ST-22 | 785 |
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SCEJ 52nd Autumn Meeting (Okayama, 2021)