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SCEJ 52nd Autumn Meeting (Okayama, 2021)

Program search result : CVD : 5 programs

ST-25,SY-56,SY-64,SY-65,SY-70 are changed from live streaming sessions to online sessions.
The preprints are now open (Sep. 8). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.

Keywords field exact matches “CVD”; 5 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 1
10:40– 11:20		VC106[Review lecture] Semiconductor Memories: Technology, Economy, Industry and Future Growth
CVD
semiconductor memory
industry
ST-22517
Day 1
11:40– 12:00		VC109Process development of bismuth-based perovskite CVD for solar cells
CVD
perovskite
methylammonium bismuth iodide
ST-22375
Day 2
9:00– 9:40		VC201[Review lecture] Growth control of nano-particles in reactive plasmas and its applications
CVD
nano-particles
growth control
ST-22514
Day 2
10:50– 11:20		VC206[Invited lecture] Challenge to simulation of microspace and macrotime structural changes under plasma irradiation
CVD
plasma
numerical simulation
ST-22519
Day 2
11:20– 11:40		VC208Construction of gas-phase elementary reaction mechanism of TiAlN-CVD based on theoretical study
TiAlN
CVD
Elementary reaction model
ST-22785
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SCEJ 52nd Autumn Meeting (Okayama, 2021)

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