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SCEJ 52nd Autumn Meeting (Okayama, 2021)

Program search result : Chemical Vapor Deposition : 4 programs

ST-25,SY-56,SY-64,SY-65,SY-70 are changed from live streaming sessions to online sessions.
The preprints are now open (Sep. 8). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.

Keywords field exact matches “Chemical Vapor Deposition”; 4 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 1
11:20– 12:00		LA108[Invited lecture] Produce nanomaterials quickly and densely: Our efforts on carbon nanotubes
practical production process
chemical vapor deposition
carbon nanotubes
SP-287
Day 1
13:00– 13:20		VK113Preparation of silica membranes by low temperature counter diffusion CVD and their membrane properties
silica membrane
chemical vapor deposition
membrane separation
SY-60303
Day 1
14:20– 14:40		VC117Si-B film deposition from boron trichloride and monomethylsilane gases
Chemical vapor deposition
Silicon-Boron film
Mechanism
ST-2240
Day 1
16:20– 16:40		VC123Development and validation of overall reaction model for polycrystalline SiC-CVD process design
(U. Tokyo) *(Stu)Moroi K., (Stu)Oku T., (Reg)Deura M., (Reg)Momose T., (Reg)Shimogaki Y.
Chemical Vapor Deposition
silicon carbide
macrocavity method
ST-22792
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SCEJ 52nd Autumn Meeting (Okayama, 2021)

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