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SCEJ 52nd Autumn Meeting (Okayama, 2021)
Program search result : Mechanism : 1 program
ST-25,SY-56,SY-64,SY-65,SY-70 are changed from live streaming sessions to online sessions.
The preprints are now open (Sep. 8). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.
The preprints are now open (Sep. 8). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.
Keywords field exact matches “Mechanism”; 1 program is found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | VC117 | Si-B film deposition from boron trichloride and monomethylsilane gases | Chemical vapor deposition Silicon-Boron film Mechanism | ST-22 | 40 |
| DispCtl: |
|---|
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SCEJ 52nd Autumn Meeting (Okayama, 2021)
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