SiCNO - Program search result - SCEJ 52nd Autumn Meeting (Okayama, 2021)

`SCEJ 52nd Autumn Meeting (Okayama, 2021)`

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Program search result : SiCNO : 1 program

ST-25,SY-56,SY-64,SY-65,SY-70 are changed from live streaming sessions to online sessions.
The preprints are now open (Sep. 8). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.

Keywords field exact matches “SiCNO”; 1 program is found.
The search results are sorted by the start time.

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Day 3 11:00– 11:20	VS307	Anti-corrosive behavior of SiCNO film formed by RT plasma-enhanced CVD (Yokohama Nat. U.) Hori Kenta, Kawakami Hiroki, *(Reg)Habuka Hitoshi	SiCNO PECVD Anti-corrosive behavior	SY-76	41

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SCEJ 52nd Autumn Meeting (Okayama, 2021)

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