Hall VC, Day 2 - Hall and day program - SCEJ 52nd Autumn Meeting (Okayama, 2021)

`SCEJ 52nd Autumn Meeting (Okayama, 2021)`

Last modified: 2023-05-16 07:28:20

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Hall and day program : Hall VC, Day 2

ST-25,SY-56,SY-64,SY-65,SY-70 are changed from live streaming sessions to online sessions.
The preprints are now open (Sep. 8). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.

Hall VC(Online), Day 2(Sep. 23)

ST-22

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
ST-22 [Trans-Division Symposium] CVD and Dry Processes
(9:00–11:40) (Chair: Saito Takeyasu, Tamaki Naoki)
9:00– 9:40	VC201	[Review lecture] Growth control of nano-particles in reactive plasmas and its applications (Kyushu U.) Koga Kazunori	CVD nano-particles growth control	ST-22	514
9:40– 10:00	VC203	One-step fabrication of CuO-loaded TiO₂ nanoparticulate thin film for photocatalytic application under visible light irradiation (Hiroshima U.) *(Stu)Hudandini Meditha, Jiang Dianping, (ITS, Indonesia) Kusdianto K., (Hiroshima U.) (Reg)Kubo Masaru, (Reg)Shimada Manabu	PECVD-PVD nanocomposite heterojunction	ST-22	154
10:00– 10:20	VC204	Preparation of TiCN thin film with Ti[N(CH₃)₂]₄ by PACVD (Osaka Pref. U.) *(Stu)Takeuchi Riku, (Reg)Okamoto Naoki, (Reg)Saito Takeyasu	plasma CVD TDMAT TiCN	ST-22	863
10:20– 10:50		Break
10:50– 11:20	VC206	[Invited lecture] Challenge to simulation of microspace and macrotime structural changes under plasma irradiation (Nat. I. Fusion Sci.) Ito Atsushi	CVD plasma numerical simulation	ST-22	519
11:20– 11:40	VC208	Construction of gas-phase elementary reaction mechanism of TiAlN-CVD based on theoretical study (U. Tokyo) *(Reg)Sato Noboru, (Stu)Yamaguchi Jun, (Kyocera) (Cor)Kubo Hayato, (Cor)Sugiyama Takanori, (U. Tokyo) (Reg)Deura Momoko, (Reg)Momose Takeshi, (Kyocera) (Cor)Tanibuchi Takahito, (U. Tokyo) (Reg)Shimogaki Yukihiro	TiAlN CVD Elementary reaction model	ST-22	785

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SCEJ 52nd Autumn Meeting (Okayama, 2021)

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