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SCEJ 52nd Autumn Meeting (Okayama, 2021)

Last modified: 2021-12-22 16:00:40

Hall and day program : Hall VC, Day 2 : VC206

ST-25,SY-56,SY-64,SY-65,SY-70 are changed from live streaming sessions to online sessions.
The preprints are now open (Sep. 8). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.

Hall VC(Online), Day 2(Sep. 23)

ST-22

TimePaper
ID
Title / AuthorsKeywordsTopic codeAck.
number
ST-22 [Trans-Division Symposium]
CVD and Dry Processes
(9:00–11:40) (Chair: Saito Takeyasu, Tamaki Naoki)
9:009:40VC201[Review lecture] Growth control of nano-particles in reactive plasmas and its applications
(Kyushu U.) Koga Kazunori
CVD
nano-particles
growth control
ST-22514
9:4010:00VC203One-step fabrication of CuO-loaded TiO2 nanoparticulate thin film for photocatalytic application under visible light irradiation
(Hiroshima U.) *(Stu)Hudandini Meditha, Jiang Dianping, (ITS, Indonesia) Kusdianto K., (Hiroshima U.) (Reg)Kubo Masaru, (Reg)Shimada Manabu
PECVD-PVD
nanocomposite
heterojunction
ST-22154
10:0010:20VC204Preparation of TiCN thin film with Ti[N(CH3)2]4 by PACVD
(Osaka Pref. U.) *(Stu)Takeuchi Riku, (Reg)Okamoto Naoki, (Reg)Saito Takeyasu
plasma CVD
TDMAT
TiCN
ST-22863
10:2010:50Break
10:5011:20VC206[Invited lecture] Challenge to simulation of microspace and macrotime structural changes under plasma irradiation
(Nat. I. Fusion Sci.) Ito Atsushi
CVD
plasma
numerical simulation
ST-22519
11:2011:40VC208Construction of gas-phase elementary reaction mechanism of TiAlN-CVD based on theoretical study
(U. Tokyo) *(Reg)Sato Noboru, (Stu)Yamaguchi Jun, (Kyocera) (Cor)Kubo Hayato, (Cor)Sugiyama Takanori, (U. Tokyo) (Reg)Deura Momoko, (Reg)Momose Takeshi, (Kyocera) (Cor)Tanibuchi Takahito, (U. Tokyo) (Reg)Shimogaki Yukihiro
TiAlN
CVD
Elementary reaction model
ST-22785

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SCEJ 52nd Autumn Meeting (Okayama, 2021)


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